The Effects of Magnetic Fields on Melt Convection in Czochralski Silicon Growth Analyzed by 3D Global Calculation

摘要

This paper aims to report the effects of magnetic fields on heat and mass transfer in a crystal growth furnace by using a global model. The global model contains radiative, conductive and convective heat transfer in the furnace. We developed a three-dimensional global code, which can calculate heat and mass transfer in a crystal growth system with transverse magnetic fields. Calculated shape of the melt-crystal interface was convex to the melt, which corresponds to experimental data. Three-dimensional flow pattern with transverse magnetic fields was obtained by the present calculation.