Czochralski crystal growth process uses mutually orthogonal current and magnetic field passage through the melt

摘要

Czochralski semiconductor single crystal growth involves supplying a current through the semiconductor melt (4) in a direction perpendicular to a magnetic field (11) generated in the melt. An Independent claim is also included for a Czochralski semiconductor single crystal growth apparatus in which the above process is carried out. Preferred Features: The current is supplied by one or more immersed electrodes (7). The magnetic field is generated perpendicular to the crystal growth front and axially symmetrical with respect to the crystal pulling shaft. Alternatively, the magnetic field is generated parallel to the crystal growth front and/or may converge to a point.