Spin-On Inter-Metal Dielectric Materials: Hydrogensilsesquioxane versus Methylsiloxane

摘要

As technology races forward, older technology nodes are often the benefactors of new and more efficient technology. One case where this has not occurred is with spin-on inter-metal dielectric (IMD) materials. Methylsiloxane spin-on glass (SOG) has been a mainstay for IMD applications for the past 15 years: Availability, history, and lack of alternative options being the driving factors for its continued use. Hydrogensilsesquioxane (HSQ) spin-on dielectrics are providing new alternatives for the replacement of older SOG materials. This paper provides a comparative review of these materials, their uses, their extendibility, and their costs.