首页> 外文会议>Indium Phosphide and Related Materials, 1991., Third International Conference. >Photoluminescence investigation of InGaAs-InGaAsP multiquantum wells for laser devices
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Photoluminescence investigation of InGaAs-InGaAsP multiquantum wells for laser devices

机译:InGaAs-InGaAsP多量子阱用于激光器件的光致发光研究

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The photoluminescence (PL) properties of InGaAs-InGaAsP multiquantum well (MQW) structures for laser devices emitting in the approximately 1.55 mu m wavelength region are discussed. Different PL techniques, such as spectral analysis for studying interface quality, spatially and spectrally resolved cartography measurements for recording peak intensity distributions, and large-area topography for defect detection, have been applied to monitor the properties of as-grown and processed structures. After establishing the good quality of the as-grown structures, it is shown that the second epitaxial growth sequence or re-growth for realizing laser devices is a crucial processing step and that its optimization should take into consideration the doping level of Zn impurity.
机译:讨论了InGaAs-InGaAsP多量子阱(MQW)结构在约1.55μm波长范围内发射的激光器件的光致发光(PL)特性。已将不同的PL技术(例如用于研究界面质量的光谱分析,用于记录峰强度分布的空间和光谱分辨制图测量以及用于缺陷检测的大面积地形)应用于监视已生长和已加工结构的特性。建立良好质量的已生长结构后,表明用于实现激光器件的第二外延生长序列或重新生长是关键的加工步骤,其优化应考虑Zn杂质的掺杂水平。

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