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Direct Printing of Heat Sinks, Cases and Power Connectors on Insulated Substrate Using Selective Laser Melting Techniques

机译:使用选择性激光熔化技术在绝缘基板上直接印刷散热器,外壳和电源连接器

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The market introduction of high temperature wide bandgap electronics power semiconductor devices with junction temperature exceeding 200°C significantly accelerates the trend towards high power density and severe ambient temperature electronics applications. Such evolution may have a great impact in aeronautics applications, especially with the development of More Electric Aircraft (MEA), since it can allow to reduce the mass and volume of the power electronics systems. As a consequence, the aircraft operating cost can decrease. However, for electronics used under such harsh conditions, heat evacuation is a very critical issue for the operation and long-term reliability of power modules. Among materials used in the power assembly, Thermal Interface Material (TIM) plays a significant role in improving the thermal contact resistance between the power module package and the heat sink. However, TIM suffers from its high thermal resistance in case of soft material use (thermal grease, phase changing films, elastomers) and from high thermomechanical stresses in case of solder use. This paper focuses on a new approach allowing direct printing of high performance heat sink on the back side of the insulated ceramic substrate leading to the removal of the TIM. In addition, the module case and the electrical connectors can also be built-up on the upper face of the insulated ceramic substrate. Selective Laser Melting (SLM) process is used to achieve complex three dimensional structures with AlSi7Mg0.6 powder alloy on the both sides of direct bonded aluminum substrate. Using this bi-material substrate involves the development of a specific tray to allow ceramic stress relaxation during process. Various heat sink designs including lattice structure, array structures (pin fins, rectangular fins, elliptical fins and water drop shaped fins) as well as channel and cold plate structure were printed. It has been shown that the design has a strong impact on the residual stresses induced during the process, and the latter can induce in some cases, significant substrate warpage and even cracks in the ceramic. Based on the experimental results, design recommendations allowing the reduction of the residual stresses in the structure are briefly introduced. Shear strength measurements have been performed to evaluate the adhesion between the built material and the substrate metallization and shear strength values higher than 20 MPa have been obtained illustrating a good interfacial joint. Finally, the thermal performance of the air cooled direct printed heat sinks was evaluated using thermo-fluidic models and results have been compared to conventional assembly with TIM.
机译:结温超过200°C的高温宽带隙电子功率半导体器件的市场引入极大地加快了向高功率密度和恶劣环境温度电子应用的趋势。这样的发展可能在航空应用中产生巨大影响,尤其是随着更多电动飞机(MEA)的发展,因为它可以减少电力电子系统的质量和体积。结果,飞机的运营成本可以降低。但是,对于在如此恶劣条件下使用的电子设备,排热对于功率模块的运行和长期可靠性而言是非常关键的问题。在电源组件中使用的材料中,热界面材料(TIM)在改善电源模块封装和散热器之间的热接触电阻方面起着重要作用。但是,在使用软材料(导热油脂,相变膜,弹性体)的情况下,TIM具有较高的耐热性,而在使用焊料的情况下,TIM具有较高的热机械应力。本文重点介绍一种新方法,该方法允许在绝缘陶瓷基板的背面直接打印高性能散热器,从而去除TIM。另外,模块壳体和电连接器也可以被构建在绝缘陶瓷基板的上表面上。选择性激光熔化(SLM)工艺用于在直接粘结的铝基板的两侧使用AlSi7Mg0.6粉末合金实现复杂的三维结构。使用这种双材料基板需要开发特定的托盘,以便在处理过程中放松陶瓷应力。印刷了各种散热片设计,包括晶格结构,阵列结构(针状鳍片,矩形鳍片,椭圆形鳍片和水滴形鳍片)以及通道和冷板结构。已经表明,该设计对在该过程中引起的残余应力有很大的影响,并且在某些情况下,后者可以引起显着的基板翘曲,甚至在陶瓷中产生裂纹。根据实验结果,简要介绍了允许减少结构中残余应力的设计建议。已经进行了剪切强度测量,以评估建筑材料与基材金属化层之间的附着力,并获得了高于20 MPa的剪切强度值,说明了良好的界面接缝。最后,使用热流体模型评估了气冷直接印刷散热器的热性能,并将结果与​​采用TIM的常规组件进行了比较。

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