Field Ionization Gas Sensors based on ZnO Nanowire

摘要

In this work we report design and characteristics of a field-ionization gas breakdown sensor based on ZnO nanowires. ZnO nanowires fabricated on metalcoated silicon samples using electrochemical technique were placed between two parallel plates separated by a small gap. Attention was paid to adjust growth parameters to produce nanowires which are most suitable for this purpose. The device was designed, fabricated and tested for Ar, N₂, O₂ and He gases in a pressure range of 0.1 <; P <; 10 Torr.