Matrix-Addressable Micro-Size Light-Emitting Diode Array Using Two-Step Etching Method

摘要

Micro-size light-emitting diode (LED) array is an important source for high-speed and large-capacity visible light communication (VLC) system. In order to realize large-scale integration of micro-size LED arrays, two-step etching method is used to reduce the difficulty of etching technique for deep groove and improve the yield of electrode interconnection. The electrical and optical properties of the matrix-addressable 8×8 array are reported, and the effects of the two-step etching technique on the electrical and optical properties are explored.