Optimization of Compact Microwave Ion Source for Generation of High Current and Low Energy Ion Beam

摘要

The purpose of the present study is to obtain a 0.5 keV Ar~(+) beam with a current of hundreds (mu)A for space charge neutralization experiment. 0.5 keV Ar~(+) beam with a current of 127 (mu)A was obtained by optimization of compact microwave ion source, and the divergence of the generated ion beam due to its space charge was investigated. As a result, the ratio of transported ion current for 700 mm within the diameter of 160 mm to the generated ion current was 0.41.