The design of laser scanning galvanometer system

摘要

In this paper, we designed the laser scanning galvanometer system according to our requirements. Based on scanning range of our laser scanning galvanometer system, the design parameters of this system were optimized. During this work, we focused on the design of the f-θ field lens. An optical system of patent lens in the optical manual book, which had three glasses structure, was used in our designs. Combining the aberration theory, the aberration corrections and image quality evaluations were finished using Code Ⅴ optical design software. An optimum f-θ field lens was designed, which had focal length of 434 mm, pupil diameter of 30 mm, scanning range of 160 mm × 160 mm, and half field angle of 18°×18°. At the last, we studied the influences of temperature changes on our system.