Airflow shear stress sensor using side-wall doped piezoresistive plate

摘要

This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.