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Failure mechanism investigation of stacked via cracking in organic chip carrier

机译:有机芯片载体中叠层通孔破裂的失效机理研究

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The increasing demand for high density interconnects leads to the adoption of stacked via technology. By layering multiple vias directly on top of each other, via stacking allows for more compact and flexible routing. However, due to the geometric discontinuity and non-uniform stiffness, stacked vias also present significant reliability challenges. In the investigation of via stack cracking mechanism in packaging applications, 16 types of stacked and staggered via chain structures were designed and fabricated in an organic chip carrier test vehicle. The experiments were also designed to evaluate other effects such as stacked via location, laminate materials, etc. Comparison of fail counts versus via chain types after 1000 cycles of deep thermal cycling (DTC) revealed that some types of stacked via structures are significantly more robust than others. Strong location dependency of stacked via fail was also observed by comparing the identical stacked via structure in different locations: out of 75 modules, 31 fails were detected in the stacked via chain under the chip center, but none under the chip corner. This paper focuses on the development of a predictive model with finite element method. Modeling activities were carried out to investigate the effect of via structure, package geometry, laminate material and other form factors on via cracking. The thermal-mechanical modeling methodology will be described in this paper. The discussion of failure mechanism and the correlation of simulations with experimental results will be presented.
机译:对高密度互连的需求不断增长,导致采用堆叠过孔技术。通过将多个通孔直接彼此层叠,通孔堆叠可以实现更紧凑,更灵活的布线。然而,由于几何形状的不连续性和不均匀的刚度,堆叠的通孔也带来了重大的可靠性挑战。在研究包装应用中的通孔堆叠破裂机理时,在有机芯片载体测试工具中设计并制造了16种类型的堆叠和交错的通孔链结构。还设计了实验来评估其他影响,例如堆叠通孔的位置,层压材料等。在1000次深热循环(DTC)之后,失效计数与通孔链类型的比较表明,某些类型的堆叠通孔结构更坚固相对于其它的。通过在不同位置比较相同的堆叠过孔结构,还观察到了堆叠过孔失效的强烈位置依赖性:在75个模块中,在芯片中心下方的堆叠过孔链中检测到31个失效,但在芯片角下未检测到失效。本文着重研究有限元方法的预测模型。进行了建模活动,以研究通孔结构,封装几何形状,层压材料和其他形状因素对通孔开裂的影响。本文将介绍热力学建模方法。将讨论失效机理以及仿真与实验结果的相关性。

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