Improving the stability of 1.5 mm2 gyroscopes down to 2°/hr at 1000 s with NEMS based sensing

摘要

This research explores the stability performance of amplitude-modulated MEMS gyroscopes based on resistive NEMS sensing for drive and sense motion detection. After careful considerations on the device and electronic design, in particular oriented to (i) terms that affect scale-factor stability and (ii) terms that affect offset stability, a system is developed using best-in-class electronic components for temperature drift. Within a maximum voltage of 5 V (without any voltage boosting), the system shows a full-scale range larger than 350 dps on a 100-Hz bandwidth, 1 mdps/vflz angle random walk and 2°/hr bias stability up to 1000 s observation interval. All these figures are obtained on a 1.5 mm^{2footprint sensor.}