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Chip Package Interactions: Package effects on copper pillar bump induced BEoL delaminations associated numerical developments

机译:芯片封装相互作用:铜柱凸块凸起的封装效果诱导BEOL DELAMINATION和相关数值发展

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During the assembly of Flip-Chip devices, some Chip-package compatibility concerns are observed while processing, such as reflow or thermal cycles. In this paper, some illustrations of failed copper pillar bump are presented and the associated failure modes are discussed. In this frame, dedicated numerical methodologies are proposed to take into account these interactions. The difference of scales between interconnects (~1μm), and package (~10 mm) components, the numerous bumps locations as well as the complex copper trace pattern of the substrate induce a large amount of elements and complex modeling. To manage these issues, several methods are used and described: Import of the copper trace pattern from CAD file, homogenization technique, multi-scale technique and dedicated scripts to automatically investigate local stress at all bump locations. Based on an actual product, typical results are depicted to illustrate the added-value of the developed methods. Focus is done on the package parameters such as bump design factors (pitch, rows number and layout) and substrate... Results show that by optimizing the densities and the bump locations with regard to the die, the stress induced by chip-package interactions can be significantly reduced. Pitch, presence of dummies bump or regular layout are underlined as key parameters. Moreover, a detailed analysis of the stress field nearby the bump according to its location with regard to the die is presented. By proposing simulation methodology including whole conception flow, this paper brings added values for product designers whose face mechanical Chip Package Interactions issues.
机译:在倒装芯片器件的组装过程中,在处理的同时观察到一些芯片包装兼容性问题,例如回流或热循环。在本文中,提出了失气铜柱凸块的一些插图,并且讨论了相关的失效模式。在该帧中,提出了专用的数值方法来考虑这些交互。互连(〜1μm)和封装(〜10mm)组分,众多凸起位置以及基板的复合铜迹线图案的差异诱导大量元素和复杂的建模。为了管理这些问题,采用多种方法和描述:从CAD文件,同质化技术,多尺度技术和专用脚本自动铜线圈图案的进口在所有凹凸位置探讨局部应力。基于实际产品,描绘了典型的结果来说明所开发方法的附加值。焦点是在包装参数上完成的,例如凹凸设计因子(音调,行数和布局)和基板...结果表明,通过优化芯片的密度和凹凸位置,由芯片包相互作用引起的应力可以显着减少。俯仰,假人的存在凸点或常规布局的存在是关键参数的下划线。此外,提出了根据其位置的凸块附近的应力场的详细分析。通过提出包括整个概念流程的仿真方法,本文为产品设计人员带来了额外的值,其面部机械芯片包装交互问题。

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