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Reliability and failure analysis of electronic components induced by the reflection of laser beam in the laser jet solder ball bonding process

机译:激光射流焊球键合工艺激光束反射引起的电子元件的可靠性和故障分析

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With advantages of non-contact, high energy density and local heating, the laser jet solder ball bonding (SBB) technique provides a flexible packaging method for three dimensional (3D) package structure and temperature sensitive components. In previous works, the microstructure and reliability of solder joints fabricated by laser jet SBB were studied. In recent studies, the essential factors influencing the wettability of the molten solder on the bonding pad in flux-free laser jet SBB process were investigated deeply, and the results revealed that the thick oxidation layer of solder balls and the severe contamination of surface of Au bonding pads can lead to the poor wetting. Meanwhile, the corresponding mechanism of the poor wetting was also discussed and analyzed. However, some other important factors causing the reliability degradation even failure of solder joints are still unclear in the laser jet SBB process, for example, the burning failure of electronic components induced by the laser beam. Thus, how to prevent this type failure becomes a tough task for mass production. In this study, from the point of view of the laser characteristics, the essential factors leading to the burning failure have been clarified through microanalysis by using scanning electron microscopy (SEM) and optical microscope (OM). Firstly, the homogeneity of the laser beam was characterized by a laser profiler. Then, in order to determine the correlation between the burning failure and the transporting characteristics of the laser beam, the different displacements of the nozzle along horizontal (x) and vertical (z) directions were preset, and the burning points in the electronic components were confirmed by using OM and SEM. In addition, the reflection of the laser beam caused by the near spherical solder ball was also studied. The results show that the energy distribution of the laser beam is inhomogeneous and some laser micro-beam has higher energy. Meanwhile, the reflection of the laser beam occurs very commonly in laser jet SBB process, not only the Au bonding pad, but also the solder ball can reflect the laser beam. When a reflecting laser micro-beam contacts to the weak interface of the electronic components with sufficient energy density, the burning failure of the component may appear easily.
机译:与非接触,高能量密度和局部加热的优点,激光喷射焊料球接合(SBB)技术提供了一种用于三维(3D)封装结构和温度敏感元件的柔性包装的方法。在以前的工作中,微结构和由激光喷墨SBB制造焊接接头的可靠性进行了研究。在最近的研究,影响在无焊剂激光喷墨SBB过程焊盘熔融焊料的润湿性的要素进行了深入研究,结果表明,焊料球的厚氧化层和Au的表面的严重污染接合垫可导致较差的润湿。同时,差的润湿的相应的机构也进行了讨论和分析。然而,导致焊点的可靠性降低甚至失效一些其它重要因素仍然在激光喷墨SBB过程不清楚,例如,通过激光束引起的电子元件的燃烧失败。因此,如何防止这种类型的故障成为大规模生产一个艰巨的任务。在这项研究中,从激光特性的点,导致燃烧故障要素已通过微量分析通过使用扫描电子显微镜(SEM)和光学显微镜(OM)澄清。首先,激光束的均匀性的特征为激光分析器。然后,为了确定燃烧失败和激光束的传送特性之间的相关性,沿水平(X)的喷嘴和垂直(Z)方向上的不同的位移被预先设定,并在电子元件的燃烧点为利用光学显微镜和SEM证实。此外,由近球形焊球的激光束的反射进行了研究。结果表明,激光束的能量分布是不均匀的,有的激光微束具有更高的能量。同时,激光束的反射激光喷射SBB过程中,不仅在Au焊盘,而且焊球可以反射激光束很常见。当反射的激光微束接触,以足够的能量密度的电子部件的弱界面,该组件的燃烧故障可能容易出现。

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