ITO Thin Films prepared by Gas-Timing RF Magnetron Sputtering for Transparent Flexible Antenna

摘要

The transparent flexible plastic antenna was fabricated. Indium tin oxide (ITO) thin film was deposited on flexible plastic substrate at room temperature by radio frequency (RF) magnetron sputtering with a new technique, called gas-timing. By using the X-ray diffraction (XRD) measurement of the ITO thin film grown by this technique, a cubic nano-crystalline structure with predominant (222) orientation was observed. The technique of gas-timing we used, the ITO thin film on flexible substrate was achieved with high transmittance in visible region of 90% and low resistivity. The performance of the new film antenna was studied experimentally with its return loss and radiation patterns.