Development of Ga-doped ZnO Transparent Electrodes as Alternatives for ITO Electrodes in Liquid Crystal Displays

摘要

The world's first 20-inch LCD-TVs with Ga-doped ZnO (GZO) transparent electrodes on the RGB color filters as an alternative to indium tin oxide (ITO) electrodes were successfully fabricated. A wet chemical etching technology suitable for patterning GZO fine lines (line/space: 2/2 μm) was concurrently developed for the fabrication of transparent electrodes on TFT pixel arrays in LCD panels.