Switching performance analysis in RF MEMS capacitive shunt switches by geometric parameters trade-offs

摘要

The high performance of Radio Frequency Micro-Electro-Mechanical Systems (MEMS) based switches like low insertion loss, high isolation and high bandwidth make them to play an important role in microwave switching. This paper presents an RF MEMS shunt capacitive switch for Ka band applications. The effect of various geometric dimensional parameters on the switching behaviour of proposed design using Electro Magnetic 3 Dimension simulator EM3DS software tool is investigated. The switch structure has been optimized on the geometrical sizes.