Fabrication of lead zirconate titanate thin films by inkjet printing

摘要

In this study, a finely patterned lead zirconate titanate (PZT) film is fabricated by a combination of inkjet printing (IJP), chemical solution deposition (CSD), and surface energy controlling technology. The PZT film, which can be used as an actuator, has enough thickness after iterating the set of surface treatment, inkjet deposition, and baking. We confirmed the electrical characteristic of this film and drop ejection from inkjet head using it.