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GENERATION OF MICRO MECHANICAL DEVICES USING STEREO LITHOGRAPHY

机译:使用立体光刻技术生成微机械设备

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摘要

A high resolution machining setup for creating three-dimensional precision components from a UV-curable photo-resin has been developed. By using frequency-converted diode-pumped solid state lasers, functional micro-mechanical devices are directly fabricated in a successive layer-by-layer fashion. Within this paper, the direct generation of micro assemblies having moving components without further assembly of parts will be presented. The micro system design is based on user-defined 3D-CAD data and will completively be built up within the fabrication cycle. By using specially developed μSL materials with suitable properties for micro-mechanical parts, the development from Rapid Prototyping towards Rapid Production of small series is intended.
机译:已经开发出一种高分辨率的加工设备,用于从可紫外线固化的光敏树脂中创建三维精密组件。通过使用频率转换的二极管泵浦固态激光器,可以以连续的逐层方式直接制造功能微机械设备。在本文中,将介绍直接生成具有移动部件的微型组件而无需进一步组装部件的情况。微型系统设计基于用户定义的3D-CAD数据,并且将在制造周期内全面构建。通过使用专门开发的具有适合微机械零件性能的μSL材料,可以实现从快速原型开发到小批量快速生产的发展。

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