Photo-Stereo Lithography System for Polymer Derived Ceramic Microsystems

摘要

A photo-stereolithography system, Viper s12, sold by the company 3D Systems, as described in the original proposal, was acquired in the summer of 2003. The system was delivered and installed by the vendor in June 2003. A graduate student, Tsali Cross, and a post-doctoral associate, Neil Cramer, from the College of Engineering at the University of Colorado received intensive training at the company site in California during Fall 2003. Since then the lithography system has been used to build single and multilayer pre-ceram1c polymer structures by UV-photopolymerization- lithography. The 'mask-less' computer interface and the vertical stepping of the tray holding the organic precursor is leading to novel applications in the fabrication of single, and multilayer ceramic microsystems. Examples of these applications are included in this report.