Piezo actuator hybrid modeling for nonlinear inverse control in diamond turning

摘要

This paper describes a micro-positioning system based on piezo actuators and a spring mechanism, and a hybrid hysteresis model integrating a neural network and Preisach model to identify the inverse dynamics of the micro-positioning system. To improve the workpiece form accuracy in diamond turning, feedforward control using the hybrid inverse model and feedback PID control were applied individually and in combination. The performance of these controllers are compared in actual cutting tests.