Sox Degrees of Freedom Error Measuring Device for Linear Motion of Slides

摘要

Although laser itnerferometer measurement system has advantages of measurement range and accuracy, it has some disadvantages when measurement of multi degrees of freedom of motion is required. Because traditional error measurement methods for geometric errors (three straightness and three angular errors) of a slide of machine tools measure error components one at a tiem. Results of such approaches lead to tedious and time consuming measurements. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric errors of a linearly moving slide in real time processes, an on-line error measurement system for simultaneous detection of six error components is required. Using laser interferometry, beam alignment technique and some optoelectronic components, an on-line measurement system with six degrees of freedom is developed in this paper. Performance verification of the system has been eprformed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of slides.