Nondestructive measurement of layer thickness in double heterostructures by x-ray double crystal diffraction

摘要

In this paper we introduce a method of measuring thin layer thickness using a sandwich structure of the In$-0.43$/Ga$- 0.57$/As$-0.15$/P$-0.85$//In$-0.13$/Ga$-0.87$/As$-0.75$/P$- 0.25$//In$-0.43$/Ga$-0.57$/As$-0.15$/P$-0.85$/ DH with the interference fringes in rocking curve by x-ray double-crystal diffraction.