PEELS and the transmission electron microscope

摘要

Parallel electron energy loss spectroscopy in the transmission electron microscope offers spatial resolution down to 1 nm or less combined with an energy resolution of 0.5 eV or less and high detection efficiency. Thus information on local specimen composition, thickness and atomic environment can be obtained. To extract the information, careful data analysis of artefact free spectra is required. Examples are given of applications to the study of NbC/TiN precipitate complexes in steels and nanometre scale TiN/Ti multilayers.