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High field carrier transport in semiconductors: From basic physics to submicron device simulation

机译:半导体中的高场载流子传输:从基本物理学到亚微米器件仿真

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The general trend of nowadays available semiconductor devices is the miniaturization of structures in order to make them able to respond to changes of bias conditions as fast as possible in such a way that cut-off frequencies be as high as possible and/or the response times be as short as possible. This is essential for microwave as well as rapid logic applications. With the recent advent of electron microlithography and new methods of crystal fabrication (MOCVD, MBF, …) the typical sizes of active layers of devices, especially in FET structures have shrunk well below the micron scale (submicron structures), making high field effects more important than ever. In modern devices studies we have thus to take into account not only the strong deviations from Ohm's law but also the possibility that over very short distances transport properties may be quite different from what they are known to be in bulk materials, allowing for instance electrons to achieve much higher velocities than those normally predicted in the bulk high field regime. In this summary, we will essentially illustrate III-V compound semiconductors and devices and compare with silicon where possible.
机译:当今可用的半导体器件的总体趋势是结构的小型化,以便使其能够以截止频率尽可能高的方式和/或响应时间尽可能快地响应于偏置条件的变化。越短越好。对于微波以及快速逻辑应用而言,这是必不可少的。随着电子微光刻技术和晶体制造新方法(MOCVD,MBF等)的出现,特别是在FET结构中,器件有源层的典型尺寸已经缩小到远低于微米级(亚微米结构),从而产生了更高的场效应。比以往任何时候都重要。因此,在现代设备研究中,我们不仅要考虑与欧姆定律的强烈偏差,还要考虑在很短的距离内传输特性可能与已知的散装材料完全不同的可能性,例如,电子可以达到的速度要比散装高场条件下通常预测的要高得多。在本概述中,我们将实质上说明III-V型化合物半导体和器件,并在可能的情况下与硅进行比较。

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