A bulk-micromachined comb vibratory microgyroscope design

摘要

In this paper, DRIE (deep reactive ion etching) bulk-micromachined single-crystal silicon comb vibratory microgyroscope is introduced. The device uses glass as substrate so that parasitic capacitance can be alleviated. Due to DRIE technique the device thickness can be increased to be more than 100/spl mu/m. The working principle of the microgyroscope is introduced. The dynamics analysis of the gyroscope is also performed. Based upon the analysis, an optimized microgyroscope design is proposed. The designed gyroscope is expected to have a sensitivity of 4nm/(/spl deg//sec).