High quality ferroelectric capacitor with a PT/PZT/PT sandwich structure prepared by an improved sol-gel method is proposed for FeRAM applications. This novel ferroelectric capacitor has high dielectric constant of about 1200, ultra-low leakage current density of 0.1 nA/cm, high remanent polarization of 20 /spl mu/C/cm/sup 2/ at coercive field of about 30 kV/cm, and almost fatigue free properties.
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机译：提出了通过改进的溶胶-凝胶法制备的具有PT / PZT / PT夹心结构的高质量铁电电容器，用于FeRAM应用。这种新型铁电电容器在约30 kV / cm的矫顽场中具有约1200的高介电常数，0.1 nA / cm的超低漏电流密度，20 / spl mu / C / cm / sup 2 /的高剩余极化率，几乎无疲劳的特性
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