Movable micromechanical joints for use in micromechatronics

摘要

This paper deals with single-crystal silicon as a structural material. Its material properties are compared to those of other materials conventionally used for mechanical applications. The advantages; of silicon, e.g. no creep fatigue, are depicted and the most popular micromechanical techniques are named and explained. It is shown how compliant structures made from single-crystal silicon structured by wet chemical etching can be used for applications like flexible guides which allow deflections within the millimetre-range (scaling up). On the other hand, conventional principles of operation know from precision engineering can be shrunken to micromechanical dimensions. As an example, a step-by-step switchgear made by using the Silicon-On-Insulator (SOI) technology is presented.