Movable micromechanical joints for use in micromechatronics

摘要

This paper deals with single-crystal silicon as a structural material. Its material properties are compared to those of other materials conventionally used for mechanical applications. The advantages of silicon, e. g. no creep fatigue, are depicted and the most popular micromechanical techniques are named and explained. It is shown how compliant structures made from single-crystal silicon structured by wet chemical etching can be used for applications like flexible guides which allow deflections within the millimetre-range (scaling up). On the other hand, conventional principles of operation know from precision engineering can be shrunken to micromechanical dimensions. As an example, a step-by-step switchgear made by using the Silicon-On-Insulator Technology is presented.