Micromechanical sensor, has fixed and movable micromechanical parts with surfaces that are arranged together, and evaluating processor unit for finding actuating force of actuator, where surfaces are removed from each other by actuator

摘要

The sensor has a fixed micromechanical part with a surface (15) and a movable micromechanical part with a surface (25), where the surfaces are arranged together. The movable part has a measuring unit (40) for measuring the movement of the movable part. The surfaces are removed from each other by an actuator with the actuating force. An evaluating processor unit is provided for determining the actuating force.