Micromechanical component used in sensors and actuators, comprises a substrate having a micromechanical functional surface, a covering surface formed on the functional surface, and an optional circuit surface formed on the covering surface

摘要

The micromechanical component comprises a substrate (1) having a micromechanical functional surface (3), a covering surface (7) formed on the micromechanical functional surface, and an optional circuit surface (SE) formed on the covering surface. The covering surface has a number of monocrystalline regions (7a-d) epitaxially grown on its lower side on a corresponding number of monocrystalline regions (16a-c) and partially laterally grown together on its upper side. An independent claim is also included for a process for the production of the micromechanical component.