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Fabrication of 3-Dimensional Cu coaxial cable using porous silicon MEMS technology

机译：使用多孔硅MEMS技术制造三维Cu同轴电缆

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摘要

In this paper we study the fabrication of 3-dimensional Cu coaxial cable by HNA etching, porous silicon micromachining and copper plating.

机译：在本文中，我们研究了通过HNA蚀刻，多孔硅微加工和镀铜来制造3维Cu同轴电缆。

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《》|2003年|p.172-173|共2页
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Duk-Soo Eun; Young-Min Kim; Su-Lack Jung; Jang-Kyoo Shin; Jong-Hyun Lee;
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中图分类无线电电子学、电信技术;
关键词
copper; metallic thin films; etching; coaxial cables; electroplating; micromachining; 3D Cu coaxial cable; porous silicon MEMS technology; etching; porous silicon micromachining; copper plating; Cu; Si;

机译：铜;金属薄膜;蚀刻;同轴电缆;电镀;微机械加工; 3D Cu同轴电缆;多孔硅MEMS技术;蚀刻;多孔硅微机械加工;镀铜; Cu; Si;

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专利

1. Fabrication of Three-Dimensional Cu Coaxial Cable Using Porous Silicon Technology [J] . Duk-Soo EUN, Jang-Kyoo SHIN, Jong-Hyun LEE Japanese Journal of Applied Physics. Part 1, Regular Papers & Short Notes . 2004,第6B期

机译：多孔硅技术制造三维铜同轴电缆
2. Design and Fabrication of Air-Bridge CPW using Porous Silicon and MEMS Technology [J] . Young-Min Kim, Jong-Hyun Lee, Seong-Ho Kong, Sensors and materials . 2005,第5期

机译：利用多孔硅和MEMS技术的气桥CPW设计与制造
3. Facile fabrication of N-doped hierarchical porous carbon@CNT coaxial nanocables with high performance for energy storage and conversion [J] . Li Yuanyuan, Xia Wei, Zou Ruqiang, RSC Advances . 2015,第117期

机译：方便地制造具有高性能的N掺杂多层多孔碳@CNT同轴纳米电缆，用于能量存储和转换
4. Fabrication of 3-Dimensional Cu coaxial cable using porous silicon MEMS technology [C] . Duk-Soo Eun, Young-Min Kim, Su-Lack Jung, International Microprocesses and Nanotechnology Conference . 2003

机译：采用多孔硅MEMS技术的三维Cu同轴电缆制备
5. Coaxial Cable Ring Resonator Based on Pair Sided Coaxial Cable Bragg Grating Coupler for Sensing Application [D] . Tang, Xiaotong. 2018

机译：基于对侧面同轴电缆布拉格光栅耦合器的同轴电缆环谐振器进行传感应用
6. Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application [O] . Zhibo Ma, Yinan Wang, Qiang Shen, 2018

机译：陀螺仪应用玻璃硅MEMS制造技术的关键工艺
7. Fabrication of Porous Silicon 3-Dimensional Periodic Structures and Their Structural and Characteristic Evaluation [O] . 前濱剛廣, 比嘉晃, 曽根川富博, 2004

机译：多孔硅三维周期性结构的制备及其结构和性能评价

Fabrication of 3-Dimensional Cu coaxial cable using porous silicon MEMS technology

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