Pyrolytic deposition of metal films on substrates in conditions of the open atmosphere initiated by nanosecond laser irradiation

摘要

The analysis of conditions of pyrolytic deposition of films of metals initiated by a nanosecond laser exposure of a substrate in a mixture of organometallic vapors with noble gas at atmospheric pressure are presented. The processes of pyrolysis can occur both in the adsorbed layer, and in a gas phase.