Film thickness dependence of ferroelectric and/or piezoelectric properties for PZT films directly deposited onto stainless-steel (SUS) substrates in actuator devices by CO{sub}2 laser-assisted aerosol deposition was investigated. Analysis of the optical spectroscopic data and experimental results of laser irradiation revealed that absorption of an CO{sub}2 laser wavelength by the film increased with increasing the film thickness. Dielectric constant, remanent polarization, and coercive field values of the film irradiated by the CO{sub}2 laser at an annealing temperature of 850°C increased with increasing the film thickness region of 5 to 30 μm. The dielectric constant, remanent polarization, and the coercive field values of the PZT film, which irradiated by the laser, with a thickness of over 25 μm directly deposited onto the SUS substrate were over 800 and 40 μC/cm{sup}2 and under 45 kV/cm, respectively. Whereas, a displacement as the piezoelectric property of a SUS-based actuator with the PZT film irradiated by the laser decreased with increasing the film thickness. Finally, the reason and some countermeasure of deterioration of the ferroelectric and/or piezoelectric properties and the displacement for the SUS-based actuators with the PZT film irradiated by the laser are discussed.
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