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Substrate surface effects on the properties of sputter-deposited and laser-irradiated films.

机译：衬底表面对溅射沉积和激光照射薄膜性能的影响。

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Sapphire substrates, mechanically polished to an optical finish, were annealed for two days at either 1000(degrees)C or 1350(degrees)C. The near surface condition of as-polished and of the annealed substrates was analyzed by Rutherford backscattering/chan ...

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作者
A. J. Pedraza M. J. Godbole L. Romana;
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年度 1991
页码 1-9
总页数 9
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Annealing; Copper; Crystal Defects; EDB/360101; EDB/360102; EDB/360106; EDB/360202; Films; Laser Radiation; Meetings; Morphology; Radiation Effects; Sapphire; Scanning Electron Microscopy; Sputtering; Substrates; Surface Properties; Transmission Electron Microscopy;

机译：退火;铜;晶体缺陷; EDB / 360101; EDB / 360102; EDB / 360106; EDB / 360202;薄膜;激光辐射;会议;形态学;辐射效应;蓝宝石;扫描电子显微镜;溅射;基板;表面特性;透射电子显微镜;

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1. Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films [J] . Schneider M., Bittner A., Patocka F., Applied Physics Letters . 2012,第22期

机译：表面近硅衬底性能对溅射沉积AlN薄膜微观结构的影响
2. Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AIN thin films [J] . M. Schneider, A. Bittner, F. Patocka, Applied Physics Letters . 2012,第22期

机译：表面近硅衬底性能对溅射沉积AIN薄膜微观结构的影响
3. The effects of substrate bias on phase stability and properties of sputter-deposited tungsten carbide [J] . J.E. Krzanowski, J.L. Endrino Materials Letters . 2004,第27a28期

机译：衬底偏压对溅射沉积碳化钨的相稳定性和性能的影响
4. Effects of Substrate Pre-deposition Annealing and Deposition Parameters on the Properties of RF Sputter-deposited ZnO Films [C] . T. N. Oder, M. McMaster, A. Smith, Materials Research Society Meeting . 2011

机译：基材预沉积退火和沉积参数对RF溅射沉积ZnO膜性能的影响
5. Evaluation of structure and material properties of RF magnetron sputter-deposited yttria-stabilized zirconia thin films. [D] . Piascik, Jeffrey Robert. 2007

机译：射频磁控溅射沉积的氧化钇稳定的氧化锆薄膜的结构和材料性能评估。
6. Substrate Temperature Dependent Microstructure and Electron-Induced Secondary Electron Emission Properties of Magnetron Sputter-Deposited Amorphous Carbon Films [O] . Jie Li, Xingkang Yi, Wenbo Hu, 2019

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7. Effect of substrate materials and its surface roughness on magnetic properties of pemalloy thin films. [O] . R. Minakata, K. Imae, K. Otsuka, 1987

机译：基材材料的影响及其表面粗糙度对Pemalloy薄膜磁性的影响。
8. Effect of Hydrochloric Acid Pretreatments on 440C Steel Surface Composition and the Adhesion and Endurance of Sputter-Deposited MoS2 Solid Lubricant Films. [R] . Hilton, M. R., Bauer, R., Didziulis, S. V., 1991

机译：盐酸预处理对440C钢表面组成及溅射沉积mos2固体润滑膜的附着力和耐久性的影响。

Substrate surface effects on the properties of sputter-deposited and laser-irradiated films.

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