Electron beam column for in-line applications featuring enhanced imagingof high-aspect-ratio structures by selective detection of on-axis secondaryelectrons,

摘要

Abstract: The scanning electron microscope presented here allows for enhanced and selective detection of on-axis secondary electrons by a novel two-detector arrangement in combination with a beam separator. It is based on our high-resolution electron beam column. The off-axis secondary electrons are recorded by a conventional in-lens detector. The on-axis secondary electrons from the primary electrons and deflects them towards a scintillator-based detector. The detector for on-axis secondary electrons can either work in a stand-alone mode or in combination with the in-lens detector. Due to the symmetry of its deflection field, the beam separator causes no first-order chromatic aberrations to the primary beam and the spatial resolution is not deteriorated. A first experimental evaluation has demonstrated the enhanced capabilities of this system. !7