Study of static electricity in wafer cleaning process

摘要

Fluorine plastic materials generally used in cleaning equipment easily produce electrostatic charge, and it causes charging to the wafer surface. In case of chemical, it has also the same affect as the wafer. The electrostatic charge on both surfaces may affect process performance, such as particle contamination by static-attracted force. Controlling static electricity on plastic materials is essential factor. However, to avoid unaware wafer charging, to account for grounding inside and outside of chamber to the wafer is important.