TERNARY NITRIDE FILMS SYNTHESIZED BY CATHODIC ARC METHOD

摘要

Changes in microstructures and corresponding physical properties of ternary nitride films such as Ti_(1-X)Al_XN, Ti_(1-X)Cr_XN, Ti_(1-X)Zr_XN, Cr_(1-X)Al_XN and Zr_(1-X)Al_XN were briefly summarized focused on micro-hardness with respect to different x value. The crystal structure and lattice parameter of ternary films change with x value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular x value was discussed based on the phase transition, analyzed by the X-ray diffraction method and transmission electron microscopy.