Nanometrology: high accuracy measuring procedures in large areas with a nanopositioning and nanomeasuring machine

摘要

The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-machine) having a resolution of 0.1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. With a new long distance focus sensor step height measurements up to 5 mm with nanometre accuracy are presented. Tactile surface topography measurements were realized with a stylus probe based on the focus sensor.