Integrated conical spring linear actuators for tilting-mirror applications

摘要

We developed integrated conical spring linear actuators (CSLAs) using thin film metallic glass (TFMG), which is a new and promising material for MST and MEMS. Each CSLA has a long motion range (200 urn) in the out-of-plane direction and a large output force (0.83 mN) with a driving voltage of 81 V. 100 CSLAs were integrated to form an actuator for tilting-mirror. The use of an AC drive prevented the sticking of the actuator during operation. Currently, Olympus Corporation proceeds to develop tilting-mirror actuators using CSLAs.