E1(TO) mode behavior of strained AlN films on sapphire

摘要

The strain evolution in thin AlN films is assessed by x-ray reciprocal spacemapping and their vibrational properties are studied by infrared reflection spectroscopy. Ablue shift of the E1(TO) mode is linearly correlated with an increase of the strain in the films.The deformation potentials of AlN E1(TO) mode are experimentally determined for differentsets of stiffness constants and the comparison with earlier theoretically calculated values ismade.