机译:通过生长模式改性,在溅射的Aln /蓝宝石上生长的高质量Aln薄膜
Guangdong Acad Sci Guangdong Inst Semicond Ind Technol Guangzhou 510650 Guangdong Peoples R China;
Guangdong Acad Sci Guangdong Inst Semicond Ind Technol Guangzhou 510650 Guangdong Peoples R China;
Guangdong Acad Sci Guangdong Inst Semicond Ind Technol Guangzhou 510650 Guangdong Peoples R China;
Guangzhou Univ Sch Phys &
Elect Engn Guangzhou 510006 Guangdong Peoples R China;
Guangdong Acad Sci Guangdong Inst Semicond Ind Technol Guangzhou 510650 Guangdong Peoples R China;
Guangdong Acad Sci Guangdong Inst Semicond Ind Technol Guangzhou 510650 Guangdong Peoples R China;
Guangdong Acad Sci Guangdong Inst Semicond Ind Technol Guangzhou 510650 Guangdong Peoples R China;
Guangdong Acad Sci Guangdong Inst Semicond Ind Technol Guangzhou 510650 Guangdong Peoples R China;
Peking Univ Sch Phys State Key Lab Artificial Microstruct &
Mesoscop P Beijing 100871 Peoples R China;
机译:通过生长模式改性,在溅射的Aln /蓝宝石上生长的高质量Aln薄膜
机译:通过生长模式改性,在溅射的Aln /蓝宝石上生长的高质量Aln薄膜
机译:通过生长模式改性通过引入空隙来生长高质量的Aln膜在蓝宝石衬底上
机译:由RF-MBE生长的蓝宝石(0001)基板上的超平板和优质ALN薄膜
机译:块状AlN单晶衬底上的富铝AlGaN和AlN生长
机译:蓝宝石衬底上具有纳米尺度厚AlN成核层的高质量无裂纹AlN薄膜的异质外延生长用于基于AlGaN的深紫外发光二极管
机译:具有纳米级厚的Aln成核层对基于Algan的深紫外发光二极管的纳米级厚的Aln成核膜的高质量和无裂缝Aln膜的异质生长
机译:射频磁控溅射和离子辅助分子束外延生长alN薄膜的比较