Radio-frequency dielectric-barrier glow discharges in atmospheric argon

摘要

An experimental investigation is presented to characterize the properties and benefits of radio-frequency(rf) dielectric-barrier discharges (DBD) in atmospheric argon. Compared to rfatmospheric glow discharges generated with bare electrodes, atmospheric argon rf DBD areshown to remain stable and uniform over a large current range from the α and the γ modes.Optical emission spectroscopy is used to show active underpinning plasma chemistry and a gastemperature range of 461 – 562 K. These highlight the advantages of argon rf DBD as a surfaceprocessing technique over more expensive helium-based rf atmospheric glow discharges.