Radio-frequency dielectric-barrier glow discharges in atmospheric argon

摘要

In this letter, an experimental investigation is presented to characterize the properties and benefits of radio-frequency (rf) dielectric-barrier discharges (DBDs) in atmospheric argon. Compared to rf atmospheric glow discharges generated with bare electrodes, atmospheric argon rf DBDs are shown to remain stable and uniform over a large current range from the α and the γ modes. Optical emission spectroscopy is used to show an active underpinning plasma chemistry and a gas temperature range of 461-562 K. These highlight the advantages of argon rf DBD as a surface processing technique over more expensive helium-based rf atmospheric glow discharges.