We propose a new microactuator to realize high track density of Hard Disk Drives (HDDs). The proposed actuator is a bi-directional driving (BDD) electrostatic actuator with multiple parallel plate electrodes. The actuator generates a large force that is twice as much as the force of a conventional uni-directional driving (UDD) actuator, and it is fabricated by micromachining technologies. The driving theory is verified by experiments with a prototype. We demonstrate the capability of actuators which will achieve 40 kilo track per inch (TPI).
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