The bottom-up chemical growth of ZnO NRs on patterned IDEs and its potential application as micro-structured sensors

摘要

ZnO nanorods (NRs) micro-structured Sensors utilizing integration of ZnO NRs on microscale interdigitated electrodes (μIDEs) was fabricated and characterized. The ZnO NRs has been grown by simple CBD method directly on the IDEs which were formed on glass substrates by conventional photolithography and magnetron sputtering techniques. The average diameter of the ZnO NRs can be about 40–100 nm, and the length can be varied from 1 to 8 µm by changing growth systems and controlling growth time. When gas targets, such as ethanol, bind onto the ZnO NRs, the conductance between IDEs will change. Clear responses were obtained by measuring and comparing current-voltage (I–V) characteristic of the sensor before and after adsorbing gases.