SELECTIVE GROWTH OF ZnO NANOSTRUCTURE USING PATTERNED ATOMIC LAYER DEPOSITION (ALD) ZnO SEED LAYER

摘要

PROBLEM TO BE SOLVED: To provide a method for growing a ZnO nanostructure without using a metal catalyst.;SOLUTION: A patterned zinc oxide nanostructure is grown without using a metal catalyst by forming a seed layer of a polycrystalline zinc oxide on the surface of a substrate. The seed layer can be formed by an atomic layer deposition technique. The seed layer is patterned, such as by etching, and the growth of at least one zinc-oxide nanostructure is induced substantially over the patterned seed layer by, for example, exposing the patterned seed layer to zinc vapor in the presence of a trace amount of oxygen. The seed layer can alternatively be formed by using a spin-on technique (such as a metal organic deposition technique, a spray pyrolysis technique, an RF sputtering technique) or by the oxidation of a zinc thin film layer formed on the substrate.;COPYRIGHT: (C)2006,JPO&NCIPI