A One-Transistor Active Pixel Sensor Formed by A Vertical Photodiode-Gated Low-Temperature Polysilicon Thin-Film Transistor

摘要

We report a compact hybrid optical sensor by vertically integrating an a-Si:H photodiode and a low-temperature polysilicon (LTPS) thin-film transistor (TFT). Such a photodiode-gated LTPS TFT combines sensing, storage, and readout switch functions and also has an internal photoconductive gain, resulting in a one-transistor active pixel sensor intended for high-resolution and high-sensitivity large-area imaging.