imec, Kapeldreef 75, B-3001 Leuven, Belgium,ESAT-INSYS, Katholieke Universiteit Leuven, B-3001 Leuven, Belgium,on leave from Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS/JAXA);
imec, Kapeldreef 75, B-3001 Leuven, Belgium,ESAT-INSYS, Katholieke Universiteit Leuven, B-3001 Leuven, Belgium;
imec, Kapeldreef 75, B-3001 Leuven, Belgium;
imec, Kapeldreef 75, B-3001 Leuven, Belgium;
ISAS/JAXA, 3-1-1 Yoshinodai, Chuo, Sagamihara, Kanagawa 252-5210, Japan;
imec, Kapeldreef 75, B-3001 Leuven, Belgium;
imec, Kapeldreef 75, B-3001 Leuven, Belgium,ESAT-INSYS, Katholieke Universiteit Leuven, B-3001 Leuven, Belgium;
机译:亚熔体激光退火SiGe外延层的应力分析和结漏
机译:碳膜作为光吸收层的红外半导体激光退火对硅晶片中注入的硼原子的活化
机译:锗和硼低温注入结合亚熔融激光尖峰退火减少p(+)Si扩散层中晶体缺陷的数量
机译:激光退火碳和硼植入SiGe外延层的组合IV和CV分析
机译:硼注入硅的非熔融激光退火。
机译:P和Al注入的4H-SiC外延层的激光退火
机译:通过LPCVD和SiGeO层的热退火获得具有IV族纳米晶体的纳米结构
机译:硼离子注入激光退火硅的热退火效应