Study of XPS and ESR OF IBAD MoS_2 Composite Films

摘要

MoS_2+Ag(Cu)composite films were deposited by ion beam assisted deposition technology. The oxidation of these films was investigated by XPS and ESR. In an atmosphere in which the relative humidity (RH) is 60%, the results of the XPS analysis show that the oxidation of MoS_2 was accelerated when Cu was doped into MoS_2, while the oxidation of the Ag + MoS_2 film was inhibited. The XPS results indicate the presence Mo~(6+) ions in the MoS_2 + Cu film, but Mo~(5+) ions in this film were not found using ESR; In the Ag + MoS_2 film, Mo~(6+) ions were not found by XPS, but Mo~(5+) ions were found by ESR. This indicates that the chemical environment greatly influences the presence of Mo~(6+) ions.